A TCAD-based approach is proposed to investigate the most relevant transport mechanisms of diamond-like carbon (DLC) films at different biases and ambient temperatures. Starting from the band structure and boundary conditions of a metal-insulator-metal (MIM) device, the most relevant trap levels have been determined against experiments along with the Poole-Frenkel conduction effect. The affinity of the DLC under study has been extracted from experiments on the corresponding metal-insulator-semiconductor (MIS) diode. A clear polarization effect has been found in the measured C-V curves at different frequencies. The latter has been modeled in the TCAD tool via the Debye equation leading to a nice agreement with experiments.
Reggiani, S., Giordano, C., Gnudi, A., Gnani, E., Baccarani, G., Dobrzynska, J., et al. (2016). TCAD-based investigation on transport properties of Diamond-like carbon coatings for HV-ICs. Institute of Electrical and Electronics Engineers Inc. [10.1109/IEDM.2016.7838557].
TCAD-based investigation on transport properties of Diamond-like carbon coatings for HV-ICs
REGGIANI, SUSANNA;GIORDANO, CARLO;GNUDI, ANTONIO;GNANI, ELENA;BACCARANI, GIORGIO;BELLINI, MAURIZIO
2016
Abstract
A TCAD-based approach is proposed to investigate the most relevant transport mechanisms of diamond-like carbon (DLC) films at different biases and ambient temperatures. Starting from the band structure and boundary conditions of a metal-insulator-metal (MIM) device, the most relevant trap levels have been determined against experiments along with the Poole-Frenkel conduction effect. The affinity of the DLC under study has been extracted from experiments on the corresponding metal-insulator-semiconductor (MIS) diode. A clear polarization effect has been found in the measured C-V curves at different frequencies. The latter has been modeled in the TCAD tool via the Debye equation leading to a nice agreement with experiments.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
