Characterization and modeling of electrical stress degradation in STI-based integrated power devices

Lateral DMOS transistors are widely used in mixed-signal integrated-circuit design as integrated high-voltage switches and drivers. The LDMOS with shallow-trench isolation (STI) is the device of choice to achieve voltage and current capability integrated in the basic CMOS processes. In this review, the electrical characteristics of the STI-based LDMOS transistors are investigated over an extended range of operating conditions through experiments and numerical analysis. The LDMOS high electric-field characteristics are explained to the purpose of investigating the effects on reliability and device performance under hot-carrier stress (HCS) conditions. A review of the HCS modeling is addressed to provide an understanding of the degradation kinetics and mechanisms. TCAD simulations of the degradation are finally proposed to explain the HCS effects on a wide range of biases and temperatures, confirming the experimental results.