Fully-electronic detection of cells and microbeads is achieved on a 320x320 array of capacitive sensors in 0.35μm 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise is ≤1.6mV, the resolution of the 12b ADC.
A. Romani, N.Manaresi, L. Marzocchi, G. Medoro, A. Leonardi, M. Tartagni, et al. (2004). Capacitive Sensor Array for Localization of Bioparticles in CMOS Lab-on-a-chip. s.l : IEEE.
Capacitive Sensor Array for Localization of Bioparticles in CMOS Lab-on-a-chip
ROMANI, ALDO;MANARESI, NICOLO';MEDORO, GIANNI;LEONARDI, ANDREA;TARTAGNI, MARCO;GUERRIERI, ROBERTO
2004
Abstract
Fully-electronic detection of cells and microbeads is achieved on a 320x320 array of capacitive sensors in 0.35μm 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise is ≤1.6mV, the resolution of the 12b ADC.File in questo prodotto:
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