Fully-electronic detection of cells and microbeads is achieved on a 320x320 array of capacitive sensors in 0.35μm 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise is ≤1.6mV, the resolution of the 12b ADC.

Capacitive Sensor Array for Localization of Bioparticles in CMOS Lab-on-a-chip

ROMANI, ALDO;MANARESI, NICOLO';MEDORO, GIANNI;LEONARDI, ANDREA;TARTAGNI, MARCO;GUERRIERI, ROBERTO
2004

Abstract

Fully-electronic detection of cells and microbeads is achieved on a 320x320 array of capacitive sensors in 0.35μm 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise is ≤1.6mV, the resolution of the 12b ADC.
Digest of Technical Papers
224
225
A. Romani; N.Manaresi; L. Marzocchi; G. Medoro; A. Leonardi; M. Tartagni; R. Guerrieri
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11585/7834
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