Fully-electronic detection of cells and microbeads is achieved on a 320x320 array of capacitive sensors in 0.35μm 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise is ≤1.6mV, the resolution of the 12b ADC.
Capacitive Sensor Array for Localization of Bioparticles in CMOS Lab-on-a-chip / A. Romani; N.Manaresi; L. Marzocchi; G. Medoro; A. Leonardi; M. Tartagni; R. Guerrieri. - STAMPA. - ISSCC 2004 Session 12.4:(2004), pp. 224-225. (Intervento presentato al convegno IEEE International Solid-State Circuits Conference, 2004. Digest of Technical Papers. ISSCC. 2004 IEEE International tenutosi a San Francisco, California USA nel 15-19 february 2004).
Capacitive Sensor Array for Localization of Bioparticles in CMOS Lab-on-a-chip
ROMANI, ALDO;MANARESI, NICOLO';MEDORO, GIANNI;LEONARDI, ANDREA;TARTAGNI, MARCO;GUERRIERI, ROBERTO
2004
Abstract
Fully-electronic detection of cells and microbeads is achieved on a 320x320 array of capacitive sensors in 0.35μm 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise is ≤1.6mV, the resolution of the 12b ADC.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.