In this work, a new method is presented for the extraction of low order electromechanical models for dynamic nonlinear simulation of radio frequency (RF) microelectromechanical (MEMS) switches, using model order reduction (MOR). The method is based on a separate modeling of the electrical and the mechanical part of the problem, which are coupled at circuit level. The derived reduced order model includes effects of initial stress in the device materials and enables a substantial speed-up of large signal dynamical analysis. The accuracy of the model has been demonstrated by comparing the simulated and measured dynamic response of a fabricated device.
Non Linear Compact Modeling of RF-MEMS Switches by Means of Model Order Reduction / L. Del Tin; J. Iannacci; R. Gaddi; A. Gnudi; E. B. Rudny; A. Greiner; J. G. Korvink. - STAMPA. - (2007), pp. 635-638. (Intervento presentato al convegno Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS 2007). tenutosi a Lyon, France nel 10-14 giugno 2007).
Non Linear Compact Modeling of RF-MEMS Switches by Means of Model Order Reduction
DEL TIN, LAURA;IANNACCI, JACOPO;GADDI, ROBERTO;GNUDI, ANTONIO;
2007
Abstract
In this work, a new method is presented for the extraction of low order electromechanical models for dynamic nonlinear simulation of radio frequency (RF) microelectromechanical (MEMS) switches, using model order reduction (MOR). The method is based on a separate modeling of the electrical and the mechanical part of the problem, which are coupled at circuit level. The derived reduced order model includes effects of initial stress in the device materials and enables a substantial speed-up of large signal dynamical analysis. The accuracy of the model has been demonstrated by comparing the simulated and measured dynamic response of a fabricated device.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.