We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulator-metal (MIM) capacitors and suspended spiral inductors, all integrated on a high resistivity Silicon substrate. The presented circuit is well-suited for all applications requiring adaptive impedance matching between two in principle unknown cascaded RF-circuits. The fabrication and testing of a monolithic integrated prototype in RFMEMS technology from ITC-irst is currently underway.
A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches / M. Bedani; F. Carozza; R. Gaddi; A. Gnudi; B. Margesin; F. Giacomozzi. - STAMPA. - (2007), pp. 320-324. (Intervento presentato al convegno Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2007) tenutosi a Stresa, Italy nel 25-27 aprile 2007).
A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches
BEDANI, MARCO;GADDI, ROBERTO;GNUDI, ANTONIO;
2007
Abstract
We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulator-metal (MIM) capacitors and suspended spiral inductors, all integrated on a high resistivity Silicon substrate. The presented circuit is well-suited for all applications requiring adaptive impedance matching between two in principle unknown cascaded RF-circuits. The fabrication and testing of a monolithic integrated prototype in RFMEMS technology from ITC-irst is currently underway.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
