Simulations of the synthesis of Si nano-particles have been carried out using a nodal method and a moment method in a 2-D geometry including a RF plasma apparatus and a reaction chamber. Turbulent effects on the nano-particle formation process have been considered and the model used for their evaluation is presented. Comparisons between the results obtained with the nodal method and the moment method have been reported and the extended amount of obtainable information that characterizes the present model has been underlined.
V. Colombo, E. Ghedini, M. Gherardi, P. Sanibondi, M. Shigeta (2011). 2-D nodal model with turbulent effects the synthesis of Si nanoparticles in RF thermal plasmas. PHILADELPHIA : International Plasma Chemistry Society (IPCS).
2-D nodal model with turbulent effects the synthesis of Si nanoparticles in RF thermal plasmas
COLOMBO, VITTORIO;GHEDINI, EMANUELE;GHERARDI, MATTEO;SANIBONDI, PAOLO;
2011
Abstract
Simulations of the synthesis of Si nano-particles have been carried out using a nodal method and a moment method in a 2-D geometry including a RF plasma apparatus and a reaction chamber. Turbulent effects on the nano-particle formation process have been considered and the model used for their evaluation is presented. Comparisons between the results obtained with the nodal method and the moment method have been reported and the extended amount of obtainable information that characterizes the present model has been underlined.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
