This letter presents a new collective and passive thin-film 3D vertical optical coupling structure which is fabricated based-on SU-8 polymer. This technology compensates for the alignment errors of the present passive optical coupling solutions. The structure is collectively manufactured on a matrix of small sized photodiodes on wafer level to vertically couple with a single mode optical fiber. The proposed structure shows a coupling efficiency between the 10μm active area diameter photodetector and single mode fiber (SMF) of 94 % and a 1dB alignment tolerance of ± 9 μm at 1550 nm. Its wafer-level mass-production capability and manufacturing process simplicity make this novel coupling approach a potential solution for short and long-range optical communication applications.
Vertical Optical Coupling Structure Based on Polymer for Small Size and High-Speed Photodetectors
Nanni, Jacopo
;Tartarini, Giovanni;
2018
Abstract
This letter presents a new collective and passive thin-film 3D vertical optical coupling structure which is fabricated based-on SU-8 polymer. This technology compensates for the alignment errors of the present passive optical coupling solutions. The structure is collectively manufactured on a matrix of small sized photodiodes on wafer level to vertically couple with a single mode optical fiber. The proposed structure shows a coupling efficiency between the 10μm active area diameter photodetector and single mode fiber (SMF) of 94 % and a 1dB alignment tolerance of ± 9 μm at 1550 nm. Its wafer-level mass-production capability and manufacturing process simplicity make this novel coupling approach a potential solution for short and long-range optical communication applications.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
