Structural analysis of nanocrystalline Silicon layers deposited on oxidized and non-oxidized silicon substrates and on glass substrates by low-energy plasma-enhanced chemical vapour deposition technique was fulfilled by means of transmission electron microscopy. Low magnification and high resolution observations of specimens performed in plan-view and cross section are described and discussed. These results are compared to those obtained by atomic force microscopy study. Growth modes and relevant structural changes are tentatively correlated to elaboration parameters.

M Texier, M Acciarri, S Binetti, D Cavalcoli, A Cavallini, D Chrastina, et al. (2007). Structural Characterization of Nanocrystalline Silicon Layers Grown by LEPCVD for Optoelectronic Applications. CAMBRIDGE : A. G. CULLIS, PA MIGDLEY.

Structural Characterization of Nanocrystalline Silicon Layers Grown by LEPCVD for Optoelectronic Applications

CAVALCOLI, DANIELA;CAVALLINI, ANNA;
2007

Abstract

Structural analysis of nanocrystalline Silicon layers deposited on oxidized and non-oxidized silicon substrates and on glass substrates by low-energy plasma-enhanced chemical vapour deposition technique was fulfilled by means of transmission electron microscopy. Low magnification and high resolution observations of specimens performed in plan-view and cross section are described and discussed. These results are compared to those obtained by atomic force microscopy study. Growth modes and relevant structural changes are tentatively correlated to elaboration parameters.
2007
PROCEEDINGS OF THE CONFERENCE MICROSCOPY OF SEMICONDUCTING MATERIALS 2007 XV
305
308
M Texier, M Acciarri, S Binetti, D Cavalcoli, A Cavallini, D Chrastina, et al. (2007). Structural Characterization of Nanocrystalline Silicon Layers Grown by LEPCVD for Optoelectronic Applications. CAMBRIDGE : A. G. CULLIS, PA MIGDLEY.
M Texier; M Acciarri; S Binetti; D Cavalcoli; A Cavallini; D Chrastina; G Isella; M Lancin; A Le Donne; A Tomasi; B Pichaud; S Pizzini; M Rossi...espandi
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11585/56842
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