The authors have investigated ultrashallow p+ /n-junction formation by solid-phase epitaxy, by using x-ray absorption near-edge spectroscopy XANES measurements at the B K edge. The authors demonstrate that B clustering occurs during the very early stages of annealing-induced Si recrystallization, i.e., when B is still in the amorphous matrix. After complete regrowth, the local structure around B remains the same as in the amorphous phase, implying that B clusters are transferred to the crystalline structure. The XANES structure are assigned to B–B sp2 bonds that are present in B clusters with two or more B atoms. Boron clustering and diffusion are further investigated by means of concentration profile analysis of ad hoc amorphous on insulator structures that evidences a clear concentration threshold for clustering and a concentration dependent B diffusion.
B clustering in amorphous Si / D. De Salvador; G. Bisognin; M. Di Marino; E. Napolitani; A. Carnera; S. Mirabella; E. Pecora; E. Bruno; F. Priolo; H. Graoui; M. A. Foad; F. Boscherini. - In: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B. - ISSN 1071-1023. - STAMPA. - 26:(2008), pp. 382-385. [10.1116/1.2781760]
B clustering in amorphous Si
BOSCHERINI, FEDERICO
2008
Abstract
The authors have investigated ultrashallow p+ /n-junction formation by solid-phase epitaxy, by using x-ray absorption near-edge spectroscopy XANES measurements at the B K edge. The authors demonstrate that B clustering occurs during the very early stages of annealing-induced Si recrystallization, i.e., when B is still in the amorphous matrix. After complete regrowth, the local structure around B remains the same as in the amorphous phase, implying that B clusters are transferred to the crystalline structure. The XANES structure are assigned to B–B sp2 bonds that are present in B clusters with two or more B atoms. Boron clustering and diffusion are further investigated by means of concentration profile analysis of ad hoc amorphous on insulator structures that evidences a clear concentration threshold for clustering and a concentration dependent B diffusion.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.