A method for verifying alignment between two integrated circuits connected to form a 3D stack. The method is based on a reference communication channel and several adjacent channels: the difference in the received signals allows to detect misalignments in x,y and z directions
Method for verifying the alignment between electronic devices / R. Canegallo; M. Scandiuzzo; E. Franchi Scarselli; A. Gnudi; R. Guerrieri. - (2012).
Method for verifying the alignment between electronic devices
FRANCHI SCARSELLI, ELEONORA;GNUDI, ANTONIO;GUERRIERI, ROBERTO
2012
Abstract
A method for verifying alignment between two integrated circuits connected to form a 3D stack. The method is based on a reference communication channel and several adjacent channels: the difference in the received signals allows to detect misalignments in x,y and z directionsFile in questo prodotto:
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