Numerical Characterization of Silicon DC Electro-Osmotic Pumps: The role of the Micro-channel Geometry,

A numerical analysis of silicon DC open channel EOPs is presented to show which parameters should be taken into account in the design of these devices. Particular attention is paid to the influence of the channel cross-section geometry on pump behavior, especially in relation to the electrical properties of the fluid. Rectangular and trapezoidal, micro and nano channels chemically etched on silicon wafers are considered and a broad range of operative conditions are analyzed. In order to make all the results available, two user-friendly correlations that predict the characteristic curves of the pumps are given as functions of the relevant parameters. The EOP model used to obtain the results is explained extensively, as well as the method used to solve it. A brief discussion on the domain in which it applies is also presented.