In this abstract, a micro wireless vacuum sensor is presented to be operated between high vacuum and atmospheric pressure. The sensor combines the Pirani principle and Surface Acoustic Waves.
Sofia TOTO, Pascal NICOLAY, Gian Luca MORINI, Michael RAPP, Jan G. KORVINK, Juergen J. BRANDNER (2018). SAW-Pirani vacuum sensor with extended range and sensitivity.
SAW-Pirani vacuum sensor with extended range and sensitivity
Gian Luca MORINI;
2018
Abstract
In this abstract, a micro wireless vacuum sensor is presented to be operated between high vacuum and atmospheric pressure. The sensor combines the Pirani principle and Surface Acoustic Waves.File in questo prodotto:
| File | Dimensione | Formato | |
|---|---|---|---|
|
MNF2018_Extended_Abstract_DRAFT_jjb_V02_jjb.pdf
accesso aperto
Tipo:
Postprint
Licenza:
Licenza per accesso libero gratuito
Dimensione
316.24 kB
Formato
Adobe PDF
|
316.24 kB | Adobe PDF | Visualizza/Apri |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
