In this abstract, a micro wireless vacuum sensor is presented to be operated between high vacuum and atmospheric pressure. The sensor combines the Pirani principle and Surface Acoustic Waves.
SAW-Pirani vacuum sensor with extended range and sensitivity
Gian Luca MORINI;
2018
Abstract
In this abstract, a micro wireless vacuum sensor is presented to be operated between high vacuum and atmospheric pressure. The sensor combines the Pirani principle and Surface Acoustic Waves.File in questo prodotto:
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MNF2018_Extended_Abstract_DRAFT_jjb_V02_jjb.pdf
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