Integration of Amorphous Silicon Balanced Photodiodes and Thin Film Heaters for Biosensing Application

This work presents the development and testing of an integrated system for on-chip detection of thermochemiluminescent biomolecules. The activation energy of the reaction is provided by a transparent structure of thin film heaters deposited on one side of a glass substrate. Light, passing through the substrate, reaches an array of amorphous silicon differential structure deposited on the opposite side of the glass substrate. The structure is designed to perform differential current measurements between a light- shielded diode, whose current is sensitive only to temperature, and a photosensor, sensitive to both incident light and temperature. The device therefore balances the thermal variations of the photodiode current and reduces the dark-current noise. These features make the presented system very appealing as highly miniaturized micro-analytical devices for biosensing applications.